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International Journal of

Recent Trends in Engineering

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International Journal of Recent Trends in Engineering (IJRTE)

ISSN 1797-9617

Volume 1, Number 4, May 2009

Issue on Electrical & Electronics

Page(s): 64-67

Design Optimization & Comparison of RF Power Sensors based on MEMS

Aniket Singh, A Amalin Prince, V P Agrawal

Full text: PDF


The RF MEMS technology has a great potential to replace conventional switching techniques and it can offer highly miniature switches and sensors with superior RF performance. The main principle of a RF MEMS based power senor is based on sensing the attractive electrostatic force between the signal line and a free standing electrode that is suspended at a small distance from the signal line. Key objective of this project is to optimize the novel configurations of MEMS based RF power sensor, and to find a design with decreased reflection and insertion losses. The aim includes showcase of a comparison between two design configurations in terms of reflection and insertion losses and general performance. Theoretical and simulated results are presented for the proposed designs of the sensor.

Index Terms

Power Sensor, RF MEMS, Optimized design, Co-Planar Waveguides.

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